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I love that you added WarGames, it literally predicted the future of the Internet and was a great movie. Matrix is probably the most ground breaking all around but War Games kicked things off.
How could you even leave this out - Back to the Future? Surely thisis a definitive film would have been in the top 3, or at least top 5.
Next would be Star Wars... these are all epic futuristic films. I could think of more but the term "tech movie" is rather loosely defined - which could bring about mentions of Mission Impossible, Robocop etc.
You forgot The Thirteenth Floor.